CDA EVG Series Betriebsanleitung

EVG®520HE Users Manual Operator Manuals General Information Interlock List Start Up & GUI De-embossing Station EVG Explorer EVG CIMFramework

Interlock List 2 Copyright © 2013 EVG Table of Contents 1 Interlock List ...

Recipe Programming Copyright © 2013 EVG 49 44 The Recipes window will open the recipe created. The window is divided into the followin

EVG CIMFramework - Core 50 Copyright © 2013 EVG 4.3.3 Recipe Commands This list contains all recipe commands that can be used on the syst

Recipe Programming Copyright © 2013 EVG 51 44 4.3.5 Common Task View The Common Task View changes depending on the active selection in

EVG CIMFramework - Core 52 Copyright © 2013 EVG 4.3.5.2 Recipe Command(s) Selected If one or more recipe step is selected, certain menu i

Recipe Programming Copyright © 2013 EVG 53 44 4.4 Edit Recipe 4.4.1 Create Recipe Command Drag and drop a recipe command from the left

EVG CIMFramework - Core 54 Copyright © 2013 EVG 4.4.3 Recipe Command Menu After selecting a recipe command, settings will appear to the r

Recipe Programming Copyright © 2013 EVG 55 44 4.4.3.2 Select Modules for Process Click or right-click the recipe step and select Ope

EVG CIMFramework - Core 56 Copyright © 2013 EVG 4.4.3.3 Disconnect Recipe Command Either click Disconnect recipe command or right-click a

Recipe Programming Copyright © 2013 EVG 57 44 4.4.4 Context Menu Right-click a recipe command or any blank area in the recipe window t

EVG CIMFramework - Core 58 Copyright © 2013 EVG 4.4.5 Delete Recipe Command Select a recipe step or multiple recipe steps (using CTRL or

Interlock List Copyright © 2013 EVG 3 11 1 Interlock List Figure 1 - Top View Figure 2 - Isometric View 1 Leakage Sensor 2 EMO Butt

Recipe Programming Copyright © 2013 EVG 59 44 4.5 Open Recipe Browsing and opening recipes can be done in the recipe overview window. I

EVG CIMFramework - Core 60 Copyright © 2013 EVG 4.6 Save Recipe The button can be used to save changes made to a recipe. A new version w

Recipe Programming Copyright © 2013 EVG 61 44 4.7 Export Recipe 1) Select the recipe that has to be exported. 2) Click Export to hu

EVG CIMFramework - Core 62 Copyright © 2013 EVG 4.8 Delete Recipe In the recipe overview window, select the Namespace that contains the re

Recipe Programming Copyright © 2013 EVG 63 44 4.9 Recipe Validation 4.9.1 Static Recipe Validation A recipe can be validated for issue

EVG CIMFramework - Core 64 Copyright © 2013 EVG 4.10 Recipe Linking Linkable recipes define a process on a module. In the following examp

Recipe Programming Copyright © 2013 EVG 65 44 4.11 Recipe Code A recipe code identifies a recipe with a specific ID. The recipe code i

EVG CIMFramework - Core 66 Copyright © 2013 EVG 5 Safety Doors 5.1 Activate Interlock Override The interlock override key is located next

Safety Doors Copyright © 2013 EVG 67 55 5.2 Open Safety Doors After initializing the system, a Request Unlock can be sent to unlock the

EVG CIMFramework - Core 68 Copyright © 2013 EVG By default, the state of all safety doors is Closed and Locked. Click Request Unlock or

Interlock List 4 Copyright © 2013 EVG 1.1 Leak Sensor Below the cooling station and the bond chamber there is a tray with a liquid sensor.

Safety Doors Copyright © 2013 EVG 69 55 5.3 Close Safety Doors In the following example all safety doors are opened. Figure 67 - Safet

EVG CIMFramework - Core 70 Copyright © 2013 EVG 6 Analysis Click on the button Analysis in the bottom navigation bar: The Analysis windo

Analysis Copyright © 2013 EVG 71 66 Logfile Details Double-click on a logfile message to open Logfile Details: Figure 69 - Logfile Det

EVG CIMFramework - Core 72 Copyright © 2013 EVG 6.3 Performance Tracking This window allows analyzing performance statistics for the entir

Analysis Copyright © 2013 EVG 73 66 If more than one module is selected for performance tracking, a graph for each module will be disp

EVG CIMFramework - Core 74 Copyright © 2013 EVG 6.4 Reports The Reports window allows collecting and listing certain events and its corres

Alarms Copyright © 2013 EVG 75 77 7 Alarms 7.1 Overview The Alarms window can be opened by clicking on Alarms (1) in the bottom navigat

EVG CIMFramework - Core 76 Copyright © 2013 EVG 7.2 Alarm Situation If there is an error, the button in bottom navigation bar and the icon

I/O Copyright © 2013 EVG 77 88 8 I/O Depending on the module, the I/O displays a list of I/O information and controls (e.g. digital inp

EVG CIMFramework - Core 78 Copyright © 2013 EVG 9 Shut Down Note: All safety doors have to be closed and locked before shutting down the s

Interlock List Copyright © 2013 EVG 5 11 1.2 Water Flow Sensor The water flow sensor checks the general water flow. Sensor: Flow meter

Shut Down Copyright © 2013 EVG 79 99 5) In EVG Explorer click the shut down button (see below): Figure 77 - Shut down button in EV

EVG CIMFramework - Core 80 Copyright © 2013 EVG History Date Modification by 2010-10-20 First written with SPU, OC, ACS WAA 2011-05-18 Up

Shut Down Copyright © 2013 EVG 81 99 EV Group Support: Phone: Fax: E-Mail: North America +1 480 305 2400 +1 480 305 2401 TechSupportU

Bond Module Customer Support Documentation EVG CIMFramework EV Group E. Thallner GmbH DI-Erich-Thallner-Straße 1 A-4782 St. F

Bond Module 2 Copyright © 2013 EVG Table of Contents 1 Module Description ...

Module Description Copyright © 2013 EVG 3 11 5.5 High Voltage ... 56

Bond Module 4 Copyright © 2013 EVG 1 Module Description 1.1 Wafer Bonding „Wafer-to-wafer“ and „chip-to-wafer“ (or “die to wafer”) are key

Module Description Copyright © 2013 EVG 5 11 1.2 Bond Module The bond module is used to perform wafer bonding processes (as described i

Bond Module 6 Copyright © 2013 EVG Main components of the bond chamber Figure 4 - Overview main components 1 Wafer bow actuator 2 Piston

Module Description Copyright © 2013 EVG 7 11 1.3 Bond Chuck The substrates are fixed (clamped) on the bond chuck and the bond chuck wil

Interlock List 6 Copyright © 2013 EVG 1.3 Over Temperature Sensor The over temperature sensor checks the temperature of the heaters. 1.3

Bond Module 8 Copyright © 2013 EVG 1.4 Safety Refer to Interlock List to find a detailed description about the location and functionality

Module Description Copyright © 2013 EVG 9 11 1.4.2 Safety Switches in Cover Clamps (if equipped) Figure 7 - Cover Clamp If th

Bond Module 10 Copyright © 2013 EVG 1.4.3 Facility Problems 1.4.3.1 Missing Water Flow If the water flow is missing a timer will be star

Process Description Copyright © 2013 EVG 11 22 2 Process Description The following chapters describe processes that can be performed on

Bond Module 12 Copyright © 2013 EVG Surface activated wafer bonding is also a direct bonding method which uses a special surface preparat

Process Description Copyright © 2013 EVG 13 22 2.2 Anodic Wafer Bonding Initially reported for joining a metal surface to a glass surfa

Bond Module 14 Copyright © 2013 EVG 2.3 Adhesive Wafer Bonding Adhesive wafer bonding is a technique using an intermediate layer for bondi

Process Description Copyright © 2013 EVG 15 22 2.4 Glass Frit Wafer Bonding This type of bond is using as intermediate layer for bondin

Bond Module 16 Copyright © 2013 EVG 2.5 Eutectic Wafer Bonding This is a wafer bonding process which uses as bonding layer an eutectic all

Process Description Copyright © 2013 EVG 17 22 Experimental results showed that good quality interfaces are obtained when temperature

Interlock List Copyright © 2013 EVG 7 11 Location: Figure 7 –Bond cover There is another over-temperature sensor (“Temperature switc

Bond Module 18 Copyright © 2013 EVG 2.6 Transient Liquid Phase (TLP) Wafer Bonding For some applications the process temperatures must be

Process Description Copyright © 2013 EVG 19 22 2.7 Metal Thermo-compression Wafer bonding Quite often people are wrongly considering th

Bond Module 20 Copyright © 2013 EVG 3 GUI 3.1 Jobs Click Jobs in the bottom navigation bar: 3.1.1 Overview Stations The overview of all

GUI Copyright © 2013 EVG 21 33 3.2 Modules 3.2.1 Bond Module Go to Modules and open the BondModule tab. It contains information about

Bond Module 22 Copyright © 2013 EVG The Parameter frame can contain the following information (depending on system configuration): CoverS

GUI Copyright © 2013 EVG 23 33 3.2.1.2 Process Information This frame displays information about the current process. This frame is on

Bond Module 24 Copyright © 2013 EVG It depends on the system configuration which symbols you have in the vacuum system overview: Symbol

Recipe Programming Copyright © 2013 EVG 25 44 4 Recipe Programming 4.1 Overview Click Recipes in the bottom navigation bar: The Recip

Bond Module 26 Copyright © 2013 EVG 4.2 Recipes The recipe defines all necessary parameters for processing substrates (e.g. temperature, p

Recipe Programming Copyright © 2013 EVG 27 44 Sequence Recipe Editor The sequence recipe Bond Substrates describes all parameters neces

Interlock List 8 Copyright © 2013 EVG 1.4 EMO Button The Emergency OFF Button (EMO Button) shuts down the system immediately. Switch: Eme

Bond Module 28 Copyright © 2013 EVG 4.2.1 Edit Bond Substrates Recipe 1) To create a new recipe step, drag and drop it to a blank line:

Recipe Programming Copyright © 2013 EVG 29 44 4.2.1.1 Move Recipe Step 1) Drag and drop a recipe step to the desired position. In the

Bond Module 30 Copyright © 2013 EVG 4.3 Recipe Steps This chapter lists all recipe steps available for the bond chamber. Note: Available

Recipe Programming Copyright © 2013 EVG 31 44 4.3.1 Heater Top and bottom heaters are used to reach a certain temperature in the bond

Bond Module 32 Copyright © 2013 EVG 4.3.1.2 Wait Temperature With the wait temperature command, the system waits until the specified temp

Recipe Programming Copyright © 2013 EVG 33 44 4.3.1.3 Preheat The preheat command is used to set the pre conditioned temperature and t

Bond Module 34 Copyright © 2013 EVG 4.3.1.4 Equalize With this recipe command the temperature of top and bottom heater can be equalized w

Recipe Programming Copyright © 2013 EVG 35 44 4.3.2 Vacuum System Most wafer bonding processes require to be performed under vacuum. T

Bond Module 36 Copyright © 2013 EVG 4.3.2.2 Purge With the purge command the chamber will be filled with different types of gases after e

Recipe Programming Copyright © 2013 EVG 37 44 4.3.2.3 Evacuate-Purge With this recipe command pressure or flow can be controlled in th

Circuit Diagrams Copyright © 2013 EVG 9 22 2 Circuit Diagrams The following figure shows an example electronic drawing of an interlock

Bond Module 38 Copyright © 2013 EVG 4.3.2.4 Wait Pressure With the wait pressure command, the system waits until the specified vacuum in

Recipe Programming Copyright © 2013 EVG 39 44 4.3.2.5 Purge Clean Using this recipe step will activate the purge clean function. No

Bond Module 40 Copyright © 2013 EVG 4.3.3 General 4.3.3.1 Flags With this recipe command the wafer separation flags between the top and

Recipe Programming Copyright © 2013 EVG 41 44 4.3.3.3 Timer With the timer command the system keeps the adjusted conditions (e.g. temp

Bond Module 42 Copyright © 2013 EVG 4.3.3.4 Monitoring With this recipe command the module parameters can be observed. It also can be che

Recipe Programming Copyright © 2013 EVG 43 44 4.3.4 Piston The piston applies the pressure necessary for the process. The piston recip

Bond Module 44 Copyright © 2013 EVG 4.3.4.3 Wait Force With the wait force command, the system waits until the specified force is reached

Recipe Programming Copyright © 2013 EVG 45 44 4.3.5 Voltage The following recipe steps are available if the system is equipped with a

Bond Module 46 Copyright © 2013 EVG 4.3.5.2 Wait Current With the wait current command the system will check if the current passes the li

Recipe Programming Copyright © 2013 EVG 47 44 4.3.5.3 Wait Charge With this recipe command the bond system is accumulating the charge

Interlock List 10 Copyright © 2013 EVG History Date Modification by 2007-10-02 First written with GCA HMA 2010-04-06 Formatted and update

Bond Module 48 Copyright © 2013 EVG 4.3.5.4 Check Resistance With the check resistance command the substrate-stack resistance can be chec

High Level Menu Copyright © 2013 EVG 49 55 5 High Level Menu Click the bond module icon to open the context menu (high level): Detai

Bond Module 50 Copyright © 2013 EVG The module mode is indicated by its border color. Click the module to find maintenance mode high leve

High Level Menu Copyright © 2013 EVG 51 55 5.1 Cover 5.1.1 Automatic Cover Open Cover Open the bond module cover. Close Cover Close

Bond Module 52 Copyright © 2013 EVG 5.2 Heater 5.2.1 Set Temperature Set the temperature of a selected heater to apply heating. 1) C

High Level Menu Copyright © 2013 EVG 53 55 5.3 Piston 5.3.1 Piston Down Move the piston down. 1) Enter the setpoint for the pisto

Bond Module 54 Copyright © 2013 EVG 5.4 Vacuum System 5.4.1 Evacuate Evacuate the bond chamber. 1) Select the mode (“Evacuate off”/“

High Level Menu Copyright © 2013 EVG 55 55 5.4.3 Evacuate – Purge Evacuate – Purge the bond chamber. Figure 41 Figure 42 1) Selec

Bond Module 56 Copyright © 2013 EVG 5.4.4 Leak Rate Check Check the leak rate of the bond chamber. 1) Enter a target pressure for the

High Level Menu Copyright © 2013 EVG 57 55 5.6 Flags 5.6.1 Flags Out Move the flags out (or in). 1) Select the flags that should

Circuit Diagrams Copyright © 2013 EVG 11 22 EV Group Support: Phone: Fax: E-Mail: North America +1 480 305 2400 +1 480 305 2401 TechS

Bond Module 58 Copyright © 2013 EVG 5.8 Wafer Bow 5.8.1 Waferbow On Activate wafer bow function. 5.8.2 Adjust Waferbow Adjust the waf

High Level Menu Copyright © 2013 EVG 59 55 5.9 Resistance 5.9.1 Get Resistance Display the measured resistance. Figure 44 191 of

Bond Module 60 Copyright © 2013 EVG 6 Recorder Software 6.1 General This software allows to record and save all process parameters. Afte

Recorder Software Copyright © 2013 EVG 61 66 6.2 Choose Parameters Choose the parameters which should be shown in the left scale. For

Bond Module 62 Copyright © 2013 EVG Press the left mouse button on the colour field for more “Graph Settigs” of the chosen value. Followi

Recorder Software Copyright © 2013 EVG 63 66 Use “Settings” – “Basic Settings” or press “Ctrl” + “S” on the keyboard to adjust the bas

Bond Module 64 Copyright © 2013 EVG 6.3 Measure Bars With the measure bar it is possible to find exact values of the visible graphs. 6.3.

Recorder Software Copyright © 2013 EVG 65 66 6.3.2 Move Measure Bar Move the mouse over a measure bar. The mouse button will change in

Bond Module 66 Copyright © 2013 EVG 6.4 Zoom Draw a rectangle over the part which should be zoomed with the mouse pointer: There are four

Recorder Software Copyright © 2013 EVG 67 66 6.5 More functions of the recorder Software 6.5.1 Grids Choose the view of the grids. Cho

General Information Customer Support Documentation EVG EV Group E. Thallner GmbH DI-Erich-Thallner-Straße 1A-4782 St. Florian/Inn

Start Up and GUI Customer Support Documentation EVG520 & EVG520IS EV Group E. Thallner GmbH DI-Erich-Thallner-Straße 1 A-

Bond Module 68 Copyright © 2013 EVG 6.5.3 “Printing” Find the buttons “Print”, “Print Preview” and “Print Setup” at menu “Printing” in th

Recorder Software Copyright © 2013 EVG 69 66 History Date Modification by 2011-11-18 First written WAA 2013-08-14 Updated screenshots,

Bond Module 70 Copyright © 2013 EVG EV Group Support: Phone: Fax: E-Mail: North America +1 480 305 2400 +1 480 305 2401 TechSupportUS@EV

Maximum Piston Force Customer Support Documentation EVG5xx EV Group E. Thallner GmbH DI-Erich-Thallner-Straße 1A-4782 St. Florian/I

Maximum Piston Force 2 Copyright © 2010 EVG Table of Contents 1 Maximum Piston Force ...

Maximum Piston Force Copyright © 2011 EVG 3 111 Maximum Piston Force The following table provides benchmark numbers for orientation what

Maximum Piston Force 4 Copyright © 2010 EVG History Date Modification by 2010-03-18 First written WAA 2011-10-05 Updated values with

Maximum Piston Force Copyright © 2011 EVG 5 11 EV Group Support: Phone: Fax: E-Mail: North America +1 480 305 2400 +1 480 305 2401 TechS

Preventive Maintenance Manual Customer Support Documentation EVG520 EV Group E. Thallner GmbH DI-Erich-Thallner-Straße 1A-4782

Preventive Maintenance Manual 2 Copyright © 2012 EVG Table of Contents 1 Note to the User...

Start Up and GUI 2 Copyright © 2012 EVG Table of Contents 1 System Description ...

Note to the User Copyright © 2012 EVG 3 115 Monthly Maintenance ...89 5.1 B

Preventive Maintenance Manual 4 Copyright © 2012 EVG 6.4 TC Wafer Test ... 131 7 Ann

Note to the User Copyright © 2012 EVG 5 111 Note to the User HAZARDOUS AREATo be opened by trained andauthorized personnel only!CAUTION!

Preventive Maintenance Manual 6 Copyright © 2012 EVG 2 Safety • The equipment represents state-of-the-art technology and optimum operationally r

Daily Maintenance Copyright © 2012 EVG 7 333 Daily Maintenance 3.1 Control Cabinet EVG520IS front view 1 Mainswitch Rack 2 Power Sup

Preventive Maintenance Manual 8 Copyright © 2012 EVG 3.2 Main Pressure The Main Pressure is permanently checked by the software. There must be a

Daily Maintenance Copyright © 2012 EVG 9 333.3 Process Gases (Purge Gas) The purge gas is not permanently checked by the software! Check

Preventive Maintenance Manual 10 Copyright © 2012 EVG Figure 3 - Purge Gas Regulator Range: 0-2 bar (8 inch system) Range: 0-1,3 bar (12 inch

Daily Maintenance Copyright © 2012 EVG 11 33 Poisonous Gases Flammable Gases Oxidizer Gases 218 of 370

Preventive Maintenance Manual 12 Copyright © 2012 EVG 3.4 Bond Tools Visually inspect the bond tool surface. There should be no deposits or scra

System Description Copyright © 2012 EVG 3 11 1 System Description 1.1 System Layout Figure 1 - System Layout 1 Bond Module 2 Signal

Daily Maintenance Copyright © 2012 EVG 13 333.4.1 Bond Tool Insert The bond tool insert should have the same thickness (8mm) all over th

Preventive Maintenance Manual 14 Copyright © 2012 EVG c) Bond tool insert thickness = measured value – wafer thickness e.g. measured value 9,

Daily Maintenance Copyright © 2012 EVG 15 333.5 Flags Make a visual inspection of the flags on the bond tools. Ensure that the flags are

Preventive Maintenance Manual 16 Copyright © 2012 EVG 3.6 Clamping Feet 1) Ensure that the clamping feet mechanism is working smoothly and all

Daily Maintenance Copyright © 2012 EVG 17 333.7 Clamping Force Note: Wrong adjusted clamp force can cause misalignment during the bondi

Preventive Maintenance Manual 18 Copyright © 2012 EVG 3.7.2 Prepare Bondchuck Figure 12 - Bondchuck 1 Bondchuck 2 Desk The Bondchuck

Daily Maintenance Copyright © 2012 EVG 19 333.7.3 Prepare Clamp: Move Flag / Clamp Inside Move the Clamp towards the center of the Bondc

Preventive Maintenance Manual 20 Copyright © 2012 EVG 3.7.5 Install Spring Balance Figure 15 - Installing Spring Balance 3.7.6 Measurement •

Daily Maintenance Copyright © 2012 EVG 21 33 • Insert the Measurement plate between the Flag and the Bondchuck: Figure 17 - Insert Meas

Preventive Maintenance Manual 22 Copyright © 2012 EVG 3.7.8 Adjustment of Clamping Force Figure 18 - Grub screw The grub screw adjusts the hei

Start Up and GUI 4 Copyright © 2012 EVG 1.1.1 User Interface The keyboard and trackball on the user interface can be used to control the

Daily Maintenance Copyright © 2012 EVG 23 333.7.9 Check the clamping force with a Force Gauge The appropriate clamping force range depen

Preventive Maintenance Manual 24 Copyright © 2012 EVG Figure 22 - Front view 1 Table 2 Force Gauge 3 Regulator The appropriate clamping force

Daily Maintenance Copyright © 2012 EVG 25 33Measurement: Turn the regulator until the measurement plate fits under the flag. The measurem

Preventive Maintenance Manual 26 Copyright © 2012 EVG Figure 20 – Clamping force of 8 N 3.8 Clamping glasses Make a visual insp

Weekly Maintenance Copyright © 2012 EVG 27 444 Weekly Maintenance 4.1 Before starting Weekly Maintenance Perform daily maintenance as de

Preventive Maintenance Manual 28 Copyright © 2012 EVG Note: The increase factor depends on the system. Use factor 10 for 40kN and factor 16 fo

Weekly Maintenance Copyright © 2012 EVG 29 44 MAC valve (old systems) SMC valve (new systems) In order to apply piston pressure (=app

Preventive Maintenance Manual 30 Copyright © 2012 EVG 4.3.1.2 Applying Piston Pressure in Manual Mode • The pressure cover has to be closed and

Weekly Maintenance Copyright © 2012 EVG 31 444.3.1.3 Troubleshooting Max. Pressure cannot be achieved or hydraulic pressure is OFF • In

Preventive Maintenance Manual 32 Copyright © 2012 EVG 4.3.1.4 Hydraulic System Maintenance Figure 24 - Hydraulic System Note: Red circle: Pres

System Startup Copyright © 2012 EVG 5 22 2 System Startup Figure 3 - Main Switch 1) Turn the main switch on the monitor (1) fully

Weekly Maintenance Copyright © 2012 EVG 33 444.3.1.5 Filling / Bleeding the hydraulic system Figure 25 Filling bleeding of the upper h

Preventive Maintenance Manual 34 Copyright © 2012 EVG Filling / bleeding the 2nd hydraulic circuit 1) In order to fill the lower hydraulic circu

Weekly Maintenance Copyright © 2012 EVG 35 44 6) Disconnect the transparent hose leading to the manual shutoff-valve and connect a funne

Preventive Maintenance Manual 36 Copyright © 2012 EVG 7) Fill the funnel with hydraulic fluid and open the shutoff-valve. 8) Now connect a sho

Weekly Maintenance Copyright © 2012 EVG 37 444.3.2 Hydraulic System Upgrade (currently used) 4.3.2.1 Schematics Without back pressure c

Preventive Maintenance Manual 38 Copyright © 2012 EVG With backpressure control Figure 31 - Hydraulic System with backpressure control Note: A

Weekly Maintenance Copyright © 2012 EVG 39 444.3.2.2 New Hydraulic System Function description Other than on the old hydraulic system, t

Preventive Maintenance Manual 40 Copyright © 2012 EVG Schematics without backpressure control Figure 32 - Hydraulic System without backpressure

Weekly Maintenance Copyright © 2012 EVG 41 44 Schematics with backpressure control Figure 33 - Hydraulic System with backpressure contro

Preventive Maintenance Manual 42 Copyright © 2012 EVG 4.3.2.3 Installation of the Upgrade Components Following part numbers (bill of materials)

Start Up and GUI 6 Copyright © 2012 EVG 3 GUI After initializing the system, the Overview Jobs should look like below. Figure 4 - Overvie

Weekly Maintenance Copyright © 2012 EVG 43 44 Remove Top Cap Figure 35 - Top Cap Align hole in the piston rod to the hole in the cap an

Preventive Maintenance Manual 44 Copyright © 2012 EVG Loosen center bolt and take square plate off Figure 37 - Square Plate Install piston rod

Weekly Maintenance Copyright © 2012 EVG 45 44 Note: Make sure to hold the piston rod in position to not tear the vacuum bellows). Then al

Preventive Maintenance Manual 46 Copyright © 2012 EVG Removing of obsolete parts Some components are not necessary with the new hydraulic-system

Weekly Maintenance Copyright © 2012 EVG 47 44Changes on the pneumatic system Please refer to schematics section 2.1.1 and 2.1.2 and this

Preventive Maintenance Manual 48 Copyright © 2012 EVG Pneumatic connections on the cylinder Figure 43 - Pneumatic Connections 1 Connect the “

Weekly Maintenance Copyright © 2012 EVG 49 444.3.2.4 Using the hydrauling unit Settings Piston up pressure (1): • 6bar • to be adjusted

Preventive Maintenance Manual 50 Copyright © 2012 EVG Piston low pressure (2): • with 1/10 pressure-converter (SAP#10022086):  0,2bar • with

Weekly Maintenance Copyright © 2012 EVG 51 44Maximum stack height measurement: 1) 20/40kN systems (cylinder diam. 100mm) • SAP# 1003256

Preventive Maintenance Manual 52 Copyright © 2012 EVG Without wafer bow unit: Set the ring to its very high position and proceed like listed abo

GUI Copyright © 2012 EVG 7 33 History Date Modification by 2012-02-29 First written HBA 2012-06-05 Updated GUI HBA 2013-10-10 Formatte

Weekly Maintenance Copyright © 2012 EVG 53 44 Without wafer bow equipped: Set ring to its very lower position and proceed with measuremen

Preventive Maintenance Manual 54 Copyright © 2012 EVG Tech tips hydraulic-cylinders with wafer bow unit: Never set the stack-height above 20mm a

Weekly Maintenance Copyright © 2012 EVG 55 44 load-cell (if equipped): Figure 50 - Load Cell Check through the plexi-glass window and m

Preventive Maintenance Manual 56 Copyright © 2012 EVG 4.4 High Voltage Any use by unauthorized personnel or careless handling may increase the p

Weekly Maintenance Copyright © 2012 EVG 57 444.5 Cover Clamps Check the pneumatic connection of the cover clamps for cracks and leakages

Preventive Maintenance Manual 58 Copyright © 2012 EVG Status of the cover clamps: clamped and locked unclamped and locked unclamped and unloc

Weekly Maintenance Copyright © 2012 EVG 59 44 The end switches are wired in series (from cover clamp 1 -> 4). If one end switch is not

Preventive Maintenance Manual 60 Copyright © 2012 EVG 4.6 Wafer Bow 4.6.1 Adjust Wafer Bow Pin Figure 54 - Overview Wafer Bow Scale 1 Locking

Weekly Maintenance Copyright © 2012 EVG 61 44 1) Prepare wafer bow pin calibration tool Figure 55 - Wafer Bow Pin Calibration Tool 268

Preventive Maintenance Manual 62 Copyright © 2012 EVG 2) Prepare bond chamber 3) Load bond chuck 4) Remove blanking flange on bond cover.

Start Up and GUI 8 Copyright © 2012 EVG EV Group Support: Phone: Fax: E-Mail: North America +1 480 305 2400 +1 480 305 2401 TechSupportU

Weekly Maintenance Copyright © 2012 EVG 63 44 5) Open Cover and insert Calibration Tool in opening. (Second person shout hold the Calibr

Preventive Maintenance Manual 64 Copyright © 2012 EVG Wafer bow overlap: 3mm (use a depth gauge to check!) Figure 56 - Check Wafer Bow overlap

Weekly Maintenance Copyright © 2012 EVG 65 444.6.1.3 CAN System To activate wafer bow pin press high level command “Wafer Bow Pin”. To d

Preventive Maintenance Manual 66 Copyright © 2012 EVG 3) Open the 3 setscrews on the adjustment ring hold the bottom-part of the adjustment rin

Weekly Maintenance Copyright © 2012 EVG 67 444.7 Uniformity Check 4.7.1 Pressure Film Test Needed equipment: • 2 SI Wafer with blank s

Preventive Maintenance Manual 68 Copyright © 2012 EVG Figure 58 - SI Wafer - Pressure Films – Chuck Finally place the second SI Wafer on the c

Weekly Maintenance Copyright © 2012 EVG 69 44 Figure 60 - Pressure Film Test Result Place the bond chuck in the chamber and apply a pi

Preventive Maintenance Manual 70 Copyright © 2012 EVG 4.7.2 Check Flatness Check the flatness of the Pressure Insert and the Bond Chuck with a s

Weekly Maintenance Copyright © 2012 EVG 71 444.7.3 Heater Flatness 4.7.3.1 Bottom Heater Make a visual check of the Heaters. Check the

Preventive Maintenance Manual 72 Copyright © 2012 EVG Figure 64 - Bottom Heater The gap between the heater and the straight edge can be measure

De-embossing Station Customer Support Documentation EVG 520 EV Group E. Thallner GmbH DI-Erich-Thallner-Straße 1A-4782 St. Florian/

Weekly Maintenance Copyright © 2012 EVG 73 444.7.3.2 Top Heater Make a visual check of the top heater. Check the flatness of the heater

Preventive Maintenance Manual 74 Copyright © 2012 EVG 4.7.5 Compliant Layer Graphite 6” Make a visual check of the compliant layer graphite. Mak

Weekly Maintenance Copyright © 2012 EVG 75 444.8 Flag Pulling Mechanism Manually activate the flag pulling mechanism: Figure 68

Preventive Maintenance Manual 76 Copyright © 2012 EVG 4.8.1 Adjustment of Flags Perform the following steps for all three flags: Figure 70 - Fl

Weekly Maintenance Copyright © 2012 EVG 77 444.8.1.2 Flag Orientation Make sure that the front end of the flag (1) is slightly higher th

Preventive Maintenance Manual 78 Copyright © 2012 EVG 4.9 Pressure Insert Required tools: Figure 74 - Compliant Layer Graphite 6” Figure 75 -

Weekly Maintenance Copyright © 2012 EVG 79 44 Replace the compliant graphite foils of the pressure disc: 1) If the System is an EVG520IS

Preventive Maintenance Manual 80 Copyright © 2012 EVG 6) Fix New Compliant Layer Graphite and Quartz Glass Pressure Disc with pressure disc cla

Weekly Maintenance Copyright © 2012 EVG 81 44 Remove disc: It is easier to remove the four red marked clamps by using a small screwdriver

Preventive Maintenance Manual 82 Copyright © 2012 EVG 4.9.1 Adjustment of Pressure Disc Adjust the pressure disc as shown in Figure 81 and Figur

De-embossing Station 2 Copyright © 2012 EVG Table of Contents 1 Process Flow for the De-embossing ...

Weekly Maintenance Copyright © 2012 EVG 83 444.10 Cleaning For all cleaning processes the entire EVG5xx system must be switched off, and

Preventive Maintenance Manual 84 Copyright © 2012 EVG 4.11 Turbo Pump – Vacuum System The following Turbo Pumps are used on the EVG5xx systems (

Weekly Maintenance Copyright © 2012 EVG 85 44 For troubleshooting refer to the OEM manual or contact EV Group. 292 of 370

Preventive Maintenance Manual 86 Copyright © 2012 EVG 4.12 Cooling Lines – Water System Check the cooling lines for any damage or leakage: Figu

Weekly Maintenance Copyright © 2012 EVG 87 44 Figure 85 - Water System 294 of 370

Preventive Maintenance Manual 88 Copyright © 2012 EVG 4.13 Over Temperature Safety Devices Disconnecting the thermocouples at these devices must

Monthly Maintenance Copyright © 2012 EVG 89 555 Monthly Maintenance 5.1 Before starting Monthly Maintenance Perform weekly maintenance a

Preventive Maintenance Manual 90 Copyright © 2012 EVG 5.3 Tool Detection Visually check the tool detection. Position of Tool Detection Sensors (

Monthly Maintenance Copyright © 2012 EVG 91 555.4 Piston Motion Check the movement of the piston. The motion of the piston has to be smo

Preventive Maintenance Manual 92 Copyright © 2012 EVG 3) Put the Load Cells into the chamber (use the adjustment plate) and thread the cables b

General Information 2 Copyright © 2012 EVG Table of Contents 1 Note to the User...

Process Flow for the De-embossing Copyright © 2012 EVG 3 111 Process Flow for the De-embossing 1) Load substrate to Bond Chuck. 2) Inser

Monthly Maintenance Copyright © 2012 EVG 93 55 4) Close the cover. Take care at the threaded cables! 5) Connect the measuring tool (de

Preventive Maintenance Manual 94 Copyright © 2012 EVG 7) Open the “Jobs” –window in the system software. Point with the mouse onto the Chamber

Monthly Maintenance Copyright © 2012 EVG 95 555.5.2 Load Cell Test UV Bond Module 1) Open bond module cover. Figure 98 - Load Cell Tes

Preventive Maintenance Manual 96 Copyright © 2012 EVG 3) Put the Load Cells into the chamber (use the adjustment plate) and thread the cables b

Monthly Maintenance Copyright © 2012 EVG 97 55 5) Remove the glass-plate (if installed) Figure 102 - Remove glass plate 6) Close the

Preventive Maintenance Manual 98 Copyright © 2012 EVG 8) The display on the measuring tool must look as shown in below (depends on the measurin

Monthly Maintenance Copyright © 2012 EVG 99 55 10) Enter the force into field “Setpoint” and press “OK” to confirm. Figure 106 - Load C

Preventive Maintenance Manual 100 Copyright © 2012 EVG 5.7 Check Voltage, Start/Stop, EMO, Mainswitch 5.7.1 Voltage Check that the three phases

Monthly Maintenance Copyright © 2012 EVG 101 555.7.3 Check EMO Button Check if the emergency stop is functioning correctly: Pushing the

Preventive Maintenance Manual 102 Copyright © 2012 EVG 5.8 Vacuum System Check the functionality of the Vacuum System, depending on the vacuum s

De-embossing Station 4 Copyright © 2012 EVG History Date Modification by 2012-10-09 First written STM 31 of 370

Monthly Maintenance Copyright © 2012 EVG 103 55 Notice: Vacuum System is customized. The Vacuum is permanently checked by the software. E

Preventive Maintenance Manual 104 Copyright © 2012 EVG • Purge 1 • Purge 2 • Purge 2 with set point in ccm/min • Purge 3 • Purge Off • Vent •

Monthly Maintenance Copyright © 2012 EVG 105 555.9 Safety Valve To check the function of the safety valve, increase the pressure on the

Preventive Maintenance Manual 106 Copyright © 2012 EVG Figure 115 1 Cap nut 2 Baffle 3 Counter nut 5.10 Gauges The following Gauges are used

Monthly Maintenance Copyright © 2012 EVG 107 555.11 Roughing Pump Following Roughing Pumps are used on the EVG5xx systems (depends on va

Preventive Maintenance Manual 108 Copyright © 2012 EVG 5.12.2 Close Cover Check if the status of “Cover” (1) changes from “open” to “closed” whe

Monthly Maintenance Copyright © 2012 EVG 109 55 Figure 118 - Leakage Sensors 1 Paper Strip 2 Potentiometer

Preventive Maintenance Manual 110 Copyright © 2012 EVG 5.14 Water filter Open the water filter and clean it. If there are any deposits in the si

Monthly Maintenance Copyright © 2012 EVG 111 555.16.1 Adjust Water Flow Figure 120 - Flow Meter 1) Close and open each flow meter t

Preventive Maintenance Manual 112 Copyright © 2012 EVG 5.17 Cooling Chucks 5.17.1 Bottom Side Cooling Chuck Turn the Bottom Cooling On/Off and

Process Flow for the De-embossing Copyright © 2012 EVG 5 11 EV Group Support: Phone: Fax: E-Mail: North America +1 480 305 2400 +1 480 3

Monthly Maintenance Copyright © 2012 EVG 113 555.17.1.1 Adjust Endswitches – Bottom Cooling Figure 122 - Endswitches for "Cooling

Preventive Maintenance Manual 114 Copyright © 2012 EVG On the newer systems only one end switch (3) is used for ON/OFF. 33321 of 370

Monthly Maintenance Copyright © 2012 EVG 115 55 To adjust the end switch press the button (4) and turn the cooling on and off. Check th

Preventive Maintenance Manual 116 Copyright © 2012 EVG 5.17.2 Top Side Cooling Chuck 1) Optical Check of the System Figure 123 2) Check if l

Monthly Maintenance Copyright © 2012 EVG 117 555.17.3 Cooling Time Check the Cooling Time of the system. 1) Load bond chuck with wafer

Preventive Maintenance Manual 118 Copyright © 2012 EVG 5.18 UV-Light Integrator Adjustment 5.18.1 Check Assembling of UV Sensor 1) Disassemble

Monthly Maintenance Copyright © 2012 EVG 119 55 2) Put the filter into the device. It does not matter which side up. 3) Mount the pla

Preventive Maintenance Manual 120 Copyright © 2012 EVG 5.18.2 Mount Sensor to the Light House 1) Mount the Sensor to the Light House like shown

Monthly Maintenance Copyright © 2012 EVG 121 555.18.3 Voltage Input Adjustment Note: For the adjustment please make sure that a new lam

Preventive Maintenance Manual 122 Copyright © 2012 EVG 5.18.4 Monitor Signal Adjustment 1) Use external measurement tool to measure the real in

EVG Explorer Customer Support Documentation EVG EV Group E. Thallner GmbH DI-Erich-Thallner-Straße 1A-4782 St. Florian/Inn 3

Monthly Maintenance Copyright © 2012 EVG 123 55 5) Calculate new value for “LightIntegratorFactor” by using the following formula: Curr

Preventive Maintenance Manual 124 Copyright © 2012 EVG 5.19 Over Temperature Switch Check the function of the over temperature sensors. 5.19.1

Monthly Maintenance Copyright © 2012 EVG 125 555.19.2 Bottom side Figure 125 - Over Temperature Switch Bottom Side Disconnecting the o

Preventive Maintenance Manual 126 Copyright © 2012 EVG 6 Quarterly Maintenance 6.1 Checking Bond module and chuck Make a visual check of the Bon

Quarterly Maintenance Copyright © 2012 EVG 127 66 Figure 127 - EVG Polish Procedure 4) After 20 circles clean up chuck insert and ston

Preventive Maintenance Manual 128 Copyright © 2012 EVG Figure 129 - EVG Polish Procedure 4) After 20 circles clean up chuck insert and stone

Quarterly Maintenance Copyright © 2012 EVG 129 666.2.3.2 Thermo Chuck The thermo chuck maintenance has to be done weekly. Figure 131 -

Preventive Maintenance Manual 130 Copyright © 2012 EVG 6.3.2 How to adjust the temperature offset To adjust the heater offset click on: Options\

Quarterly Maintenance Copyright © 2012 EVG 131 66Afterwards the apply button has to be clicked for saving the new adjustment. This will n

Preventive Maintenance Manual 132 Copyright © 2012 EVG 7 Annual Inspection Check the following points in addition to the monthly maintenance Too

EVG Explorer 2 Copyright © 2010 EVG Table of Contents 1 Overview ...

Annual Inspection Copyright © 2012 EVG 133 777.2 Cooling Lines Check the cooling lines for any damage or leakage: Figure 133 - Water S

Preventive Maintenance Manual 134 Copyright © 2012 EVG Figure 134 - Water System 341 of 370

Annual Inspection Copyright © 2012 EVG 135 777.3 Cleaning Procedure Clean all chambers with IP alcohol. After you have cleaned the whol

Preventive Maintenance Manual 136 Copyright © 2012 EVG 7.9 Wafer bow Contact of the Piston Check if the wafer bow contacts the bond tool when y

Troubleshooting Copyright © 2012 EVG 137 888 Troubleshooting 8.1 Bonder doesn’t heat Bonder doesn’t heat Bonder doesn´t heatON OFFT

Preventive Maintenance Manual 138 Copyright © 2012 EVG 8.2 Bonder doesn’t reach end temperature Bonder doesn´t reach end temperaturet > 350°

Troubleshooting Copyright © 2012 EVG 139 888.3 Endvacuum not reached Turbo Pump on full speed?Endvacuum not reachedOK NOKWhich error

Preventive Maintenance Manual 140 Copyright © 2012 EVG 8.4 No High Voltage Attention High Voltage: Take care when you measure on the high volt

Personal Protective Equipment (PPE) Copyright © 2012 EVG 141 999 Personal Protective Equipment (PPE) Chemical resistant latex gloves Thi

Preventive Maintenance Manual 142 Copyright © 2012 EVG 10 Lockout/Tagout Mainswitch OFF and LOCK: Start und shutdown procedure Power OFF The se

Overview Copyright © 2010 EVG 3 111 Overview After starting the system the EVG Explorer will be started: Figure 1 - EVG Explorer 3 2 1

Facility Requirements Copyright © 2012 EVG 143 111111 Facility Requirements Purpose / Type Volume / Specification Voltage: Europe

Preventive Maintenance Manual 144 Copyright © 2012 EVG 11.1 EVG520 Purpose / Type Dia./ Size Volume / Specification OD: 8 mm (3/8”) 8 bar (Min

Facility Requirements Copyright © 2012 EVG 145 1111 History Date Modification by 2008-12-12 Formatted WAA 2009-03-06 Added “Adjust h

Preventive Maintenance Manual 146 Copyright © 2012 EVG EV Group Support: Phone: Fax: E-Mail: North America +1 480 305 2400 +1 480 305 2401 Tech

EaseUS Todo Backup Customer Support Documentation EVG EV Group E. Thallner GmbH DI-Erich-Thallner-Straße 1A-4782 St. Florian/Inn

EaseUS Todo Backup 2 Copyright © 2011 EVG Table of Contents 1 General Information ...

General Information Copyright © 2011 EVG 3 111 General Information 1.1 Introduction Recovering the system PC from a backup may be necessa

EaseUS Todo Backup The backup software will be opened where all features and settings for backup and recovery can be set up. Figure 1 - Backup Home

Create Backup Copyright © 2011 EVG 5 222 Create Backup Backup or the operation of backing up always means creating copies of important da

EaseUS Todo Backup 2.2 Creating a System Backup File Before creating a backup, make sure that there is a folder named with the current date in the for

EVG Explorer 1.1 Title Bar The title bar displays the EVG system (e.g. “EVG620”): Figure 2 - Title Bar 1.2 Main Area Figure 3 - Main Area 3 4 1 2 1

Create Backup Copyright © 2011 EVG 7 22 Select the destination folder (e.g. on a backup hard drive or network drive) and click Proceed to

EaseUS Todo Backup 2.3 Create a Bootable Media Go to Tools and click Bootable media builder. Figure 5 - Tools page Select if the bootable media shou

Create Backup Copyright © 2011 EVG 9 22 Wait while the bootable media is created and then click Finish. Figure 7 - Building progress 36

EaseUS Todo Backup 3 How to Recover Depending on the issue, recovery can be performed according to the following figure (e.g. bootable media or backup

How to Recover Copyright © 2011 EVG 11 333.1 Recover from Backup File Go to Recovery page and click System recovery. Figure 8 - System

EaseUS Todo Backup Select which hard drive should be used as a recovery location. Figure 10 - Select recovery location Note: When you intend to rec

How to Recover Copyright © 2011 EVG 13 333.2 Recover with Bootable Media Turn OFF the system PC. Insert the bootable emergency DVD into

EaseUS Todo Backup 3.3 Recover using Pre-OS After switching on the system, the following boot menu will be displayed. Figure 12 - Boot menu for Pre-O

How to Recover Copyright © 2011 EVG 15 33 The software looks like in Windows except that some functions are disabled in Pre-OS. Go to Re

EaseUS Todo Backup 16 Copyright © 2011 EVG History Date Modification by 2011-10-24 First written with LES and KT WAA 369 of 370

Overview Copyright © 2010 EVG 5 111.2.1 Application Groups This section displays the list of application groups available to the user cu

How to Recover Copyright © 2011 EVG 17 33 EV Group Support: Phone: Fax: E-Mail: North America +1 480 305 2400 +1 480 305 2401 TechSuppo

EVG Explorer 1.2.1.1 Maintenance Tools Only maintenance and service engineers have access to the maintenance tools. The Maintenance Tools: click her

Overview Copyright © 2010 EVG 7 111.2.2 Applications This section displays all applications in the currently selected application group

Note to the User Copyright © 2012 EVG 3 111 Note to the User Installation, adjustment, programming and maintenance (except periodical m

EVG Explorer 1.2.2.1 EVG Control Software The application group “EVG Control Software” is available to every user group. The following applications

Overview Copyright © 2010 EVG 9 111.2.3 Operating System Controls Depending on user level the following controls are available: Change

EVG Explorer 1.2.4 Status Bar Figure 8 - Status Bar 1 2 3 4 1 Information about the computer 10 Copyright © 2010 EVG Displays the c

Overview Copyright © 2010 EVG 11 111.3.2 Running Applications All running applications are displayed here. Moving the mouse cursor over

EVG Explorer 2 “EVG Remote Support” Tool Open “Maintenance Tools” (1) and double-click on “EVG Remote Support” (2) to start the tool: Figure 10 - EV

“EVG Remote Support” Tool Copyright © 2010 EVG 13 222.1 EVG TechSupport offline The EVG Remote Support Tool is started, but the EVG Tech

EVG Explorer 2.2 EVG TechSupport online The EVG Remote Support Tool is started and the EVG TechSupport is online. Enter a text in bottom message box

“EVG Remote Support” Tool Copyright © 2010 EVG 15 222.3 Benefits • Secure 256 bit AES encrypted connection • No software installation

EVG Explorer 3 “EVG Manual Copy” Tool 3.1 Copy Manual Open “Maintenance Tools” (1) and double-click on “EVG Manual Copy” (2) to start the tool: Figu

“EVG Manual Copy” Tool Copyright © 2010 EVG 17 333.2 Open Manual Open “EVG Control Software” (1) and double-click on “EVG Manual” (2) to

General Information 4 Copyright © 2012 EVG 2 About this Manual The following manual is written for documentation purposes. It describes th

EVG Explorer 18 Copyright © 2010 EVG History Date Modification by 2009-04-22 First written with EDC STZ 2009-07-22 Added and updated

“EVG Manual Copy” Tool Copyright © 2010 EVG 19 33 EV Group Support: Phone: Fax: E-Mail: North America +1 480 305 2400 +1 480 305 2401 T

EVG CIMFramework - Core Customer Support Documentation EVG EV Group E. Thallner GmbH DI-Erich-Thallner-Straße 1 A-4782 St. Fl

EVG CIMFramework - Core 2 Copyright © 2013 EVG Table of Contents 1 Start Up ...

Start Up Copyright © 2013 EVG 3 11 4.4 Edit Recipe ... 53 4.4.1 Cr

EVG CIMFramework - Core 4 Copyright © 2013 EVG 1 Start Up 1.1 Login 1) After starting the system the EVG Explorer is opened. Double-click

Start Up Copyright © 2013 EVG 5 11 3) Enter the User Name and Password in the login window and click Login to confirm. Figure 2 - EV

EVG CIMFramework - Core 6 Copyright © 2013 EVG 1.2 Initialize Click System in the bottom navigation bar. The window Overview in System w

Start Up Copyright © 2013 EVG 7 11 In the System frame there is an area displaying the current Equipment Processing State. Click the

EVG CIMFramework - Core 8 Copyright © 2013 EVG 1.3 Equipment Processing State The following overview lists all possible equipment processi

Recovery from Errors Copyright © 2012 EVG 5 333 Recovery from Errors Most errors that will occur require going into an engineering or ma

Start Up Copyright © 2013 EVG 9 11 1.3.1 Disconnected State  Module is physically disconnected (optional).  Module is ignored and

EVG CIMFramework - Core 10 Copyright © 2013 EVG Right-click a module and select Enable to switch from disabled to enabled state (or Disab

Start Up Copyright © 2013 EVG 11 11 1.3.4 Maintenance Mode  Module is not available for executing or cleanup.  Maintenance mode is

EVG CIMFramework - Core 12 Copyright © 2013 EVG 1.3.5 Executing State  While in Executing state, the module is in use by the equipment

GUI Copyright © 2013 EVG 13 22 2 GUI The basic layout of every window in EVG CIMFramework is divided into the following three parts: F

EVG CIMFramework - Core 14 Copyright © 2013 EVG Status Information The status information is located on the top of the screen. It is alway

GUI Copyright © 2013 EVG 15 22 Navigation Bar The navigation bar is located at the bottom of the screen. It is always visible while wor

EVG CIMFramework - Core 16 Copyright © 2013 EVG 2.1 Jobs Click Jobs in the bottom navigation bar: The Overview Stations of Jobs window w

GUI Copyright © 2013 EVG 17 22 2.1.1 Overview Stations The Overview Stations displays an overview of all modules in the system (e.g. R

EVG CIMFramework - Core 18 Copyright © 2013 EVG 2.1.1.1 Station Status The current station status is indicated by its border color. Refer

General Information 6 Copyright © 2012 EVG History Date Modification by 2011-11-17 First written WAA 7 of 370

GUI Copyright © 2013 EVG 19 22 2.1.1.2 Multiple Slot Modules Modules with multiple slots offer settings for single slots (sub modules)

EVG CIMFramework - Core 20 Copyright © 2013 EVG 2.1.2 Overview Jobs The Overview Jobs tab contains a list of all queued, active and compl

GUI Copyright © 2013 EVG 21 22 2.2 Modules Click Modules in the bottom navigation bar: The Modules window contains a detailed overvie

EVG CIMFramework - Core 22 Copyright © 2013 EVG 2.3 Recipes Click Recipes in the bottom navigation bar: The Recipes window will be opene

GUI Copyright © 2013 EVG 23 22 2.4 System Click System in the bottom navigation bar: The System window will be opened: Figure 25 - S

EVG CIMFramework - Core 24 Copyright © 2013 EVG 2.4.1 Overview The Overview tab displays basic system information: Figure 26 - System -

GUI Copyright © 2013 EVG 25 22 2.4.1.1 System Frame The System frame is used to control the system state (close application, initializ

EVG CIMFramework - Core 26 Copyright © 2013 EVG 2.4.1.3 Information Frame The Information frame displays version information (e.g. operat

GUI Copyright © 2013 EVG 27 22 2.4.2 Safety Doors Open the tab Safety Doors to find the current state and controls of safety doors and

EVG CIMFramework - Core 28 Copyright © 2013 EVG 2.4.2.1 Interlocked Modules The following area displays the current status of interlocked

Recovery from Errors Copyright © 2012 EVG 7 33 EV Group Support: Phone: Fax: E-Mail: North America +1 480 305 2400 +1 480 305 2401 Tech

GUI Copyright © 2013 EVG 29 22 2.4.4 Facility Management Open the tab Facilities. The current state of facility items is displayed h

EVG CIMFramework - Core 30 Copyright © 2013 EVG 2.4.5 Tracking Open the Tracking tab to find an overview of all materials that are curren

GUI Copyright © 2013 EVG 31 22 2.5 Setup Click Setup in the bottom navigation bar: The User Management will be opened. 2.5.1 Users

EVG CIMFramework - Core 32 Copyright © 2013 EVG Add User Click on to open the window “Add User”: Figure 34 - Add User Enter the user i

GUI Copyright © 2013 EVG 33 22 2.5.1.1 Custom Access Levels Use the following list to change the access levels for specific program fu

EVG CIMFramework - Core 34 Copyright © 2013 EVG 3 Jobs 3.1 Job Controls Add a new job to queue. After confirming by clicking OK, the job

Jobs Copyright © 2013 EVG 35 33 3.2 Clean Up (optional) If there is a substrate in any module, it is required to perform a cleanup. If

EVG CIMFramework - Core 36 Copyright © 2013 EVG 3.3 Add Job 1) Click the following button in the bottom navigation bar to open the Jobs w

Jobs Copyright © 2013 EVG 37 33 3) The window Add Job appears. Select a namespace and recipe from the list and click Next to continue

EVG CIMFramework - Core 38 Copyright © 2013 EVG 4) Click Add Carrier to select a carrier for source and destination slots. 5) Select

Interlock List Customer Support Documentation EVG520IS / EVG520HE EV Group E. Thallner GmbH DI-Erich-Thallner-Straße 1 A-4782

Jobs Copyright © 2013 EVG 39 33 3.4 Execute Job After executing the job the Overview Stations will change as described in the example b

EVG CIMFramework - Core 40 Copyright © 2013 EVG 4 Recipe Programming Click Recipes in the bottom navigation bar. The Recipes window will

Recipe Programming Copyright © 2013 EVG 41 44 4.1 Recipe Namespace Note: Every recipe has to be assigned to a “Recipe Namespace” (RNS).

EVG CIMFramework - Core 42 Copyright © 2013 EVG 4.1.3 Delete Namespace 1) Select an existing namespace. 2) Click Delete namespace. 3)

Recipe Programming Copyright © 2013 EVG 43 44 4.2 Recipe Overview The Recipe Overview defines the flow of the substrate. It also descri

EVG CIMFramework - Core 44 Copyright © 2013 EVG 4.2.1 Select Namespace Click one of the recipe Namespaces on the left to select it. Figu

Recipe Programming Copyright © 2013 EVG 45 44 4.2.2 Select Single Recipe Click one of the Recipes on the left to select it. Figure 44

EVG CIMFramework - Core 46 Copyright © 2013 EVG 4.2.3 Select Multiple Recipes Click multiple Recipes while holding SHIFT key to select mu

Recipe Programming Copyright © 2013 EVG 47 44 4.2.4 Select Version Click one of the Versions to select it. Figure 49 - Version Select

EVG CIMFramework - Core 48 Copyright © 2013 EVG 4.3 Create New Recipe Select the namespace that the new recipe should be created in. Figu